ANSI/ASME B89.1.8-2011 位移测量激光干涉仪的性能评估

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【英文标准名称】:PerformanceEvaluationofDisplacement-MeasuringLaserInterferometers
【原文标准名称】:位移测量激光干涉仪的性能评估
【标准号】:ANSI/ASMEB89.1.8-2011
【标准状态】:现行
【国别】:美国
【发布日期】:2011
【实施或试行日期】:
【发布单位】:美国国家标准学会(US-ANSI)
【起草单位】:ANSI
【标准类型】:()
【标准水平】:()
【中文主题词】:
【英文主题词】:Angularmeasurement;Dimensionalmetrology;Displacement;Evaluation;Interferometers;Laserengineering;Laserequipment;Lasers;Linearmeasurement;Measurement,testingandinstruments;Measuring;Measuringinstruments;Metrology;Optoelectronics;Performance
【摘要】:Thisstandardestablishesrequirementsandmethodsforthespecification,evaluation,setupanduseoflaserinterferometers.Thisstandardwillexplicitlydiscussonlysingle-passopticsandasingleaxisoflineardisplacementmeasurement.Thestandardiscurrentlylimitedtoionizedgaslaserinterferometersystems.Onlysingle-colorlaserswillbeconsideredinthisversionofthelaserstandard.Singlecolorwillincludebothhomodynesystemsandheterodynesystems(seeAppendixE)whereoperatingfrequenciesallliewithinaDopplerbroadenedfrequencybandassociatedwithonespecificatomictransitionorZeemanmultiplet.Diodelasersystems,chirpsystems,andtwo-colorinterferometersmaybeincludedinfutureversionsofthisstandard.ItshouldbenotedthatthefoldedcommonpathcomparisontechniqueofthisstandardcouldbeusedtocompareanyoftheabovesystemstoastandardHe-Nelaserinterferometer.
【中国标准分类号】:N13
【国际标准分类号】:17_040_30;31_260
【页数】:
【正文语种】:英语